Photoresist Chemicals 1,4-Benzodioxin, 5,6,7,8-tetrachloro-2-(2,5-dimethylphenyl)-2,3-dihydro-3-methyl-, (2R,3R)-rel-, compd. with cyclohexane (2:1) Cas:880543-72-6 Molecular Formula:C17H14Cl4O2.1/2C6H12