Photoresist Chemicals 1-Piperazinecarboxylic acid, 4-[(1S)-1-[[[(1,1-dimethylethyl)dimethylsilyl]oxy]methyl]-2-(phenylmethoxy )ethyl]-3-oxo-, 1,1-dimethylethyl ester Cas:850148-81-1 Molecular Formula:C25H42N2O5Si