Photoresist Chemicals 2-Cyclopentene-1,2-dimethanol, 4-[[(1,1-dimethylethyl)dimethylsilyl]oxy]-5-[[[(1,1-dimethylethyl)diphenylsil yl]oxy]methyl]-3-methyl-, (1R,4S,5R)-rel- Cas:848757-25-5 Molecular Formula:C31H48O4Si2