Photoresist Chemicals Thieno[2,3-b]pyridine-2-carboxamide, N-[cis-4-[1-(3,4-difluorophenyl)-6-fluoro-1,4-dihydro-2,4-dioxopyrido[2,3 -d]pyrimidin-3(2H)-yl]cyclohexyl]- Cas:919294-89-6 Molecular Formula:C27H20F3N5O3S