Photoresist Chemicals 4H-1,3-Benzodioxin-4-one, 5-[(2Z,5E,7R)-7-[[diethyl(1-methylethyl)silyl]oxy]-4-[[(1,1-dimethylethyl)di methylsilyl]oxy]-3-methyl-2,5-octadienyl]-2,2-dimethyl- Cas:569340-71-2 Molecular Formula:C32H54O5Si2