Photoresist Chemicals 1-Piperidinecarboxylic acid, 4-[[[4-[(4-fluoro-1H-indol-5-yl)oxy]-7-methoxy-6-quinazolinyl]oxy]methyl]-, 1,1-dimethylethyl ester Cas:574746-03-5 Molecular Formula:C28H31FN4O5