Photoresist Chemicals Spiro[3H-indole-3,4′-piperidine]-1′-carboxylic acid, 1-(2,6-difluorobenzoyl)-5-(1,1-dimethylethyl)-1,2-dihydro-, phenylmethyl ester Cas：918421-65-5 Molecular Formula：C31H32F2N2O3