Photoresist Chemicals Glycine,N-[2-[[(1,2,3,6-tetrahydro-1,3-dimethyl-2,6-dioxo-7H-purin-7-yl)acetyl]thio]-1-oxopropyl]-(9CI) Cas:94088-02-5 Molecular Formula:C14H17 N5 O6 S