Photoresist Chemicals Butanoic acid, 4-[[1,4-dihydro-3-(3-thienyl)indeno[1,2-c]pyrazol-5-yl]amino]-4-oxo-, methyl ester, mono(trifluoroacetate) Cas:866851-43-6 Molecular Formula:C19H17N3O3S.C2HF3O2