Photoresist Chemicals 9-Oxa-3,7-diazabicyclo[3.3.1]nonane-3-carboxylic acid, 7-[2-[[3-(4-cyanophenyl)propyl](methylsulfonyl)amino]ethyl]-, 1,1-dimethylethyl ester Cas:872006-92-3 Molecular Formula:C24H36N4O5S