Photoresist Chemicals 7H-Pyrazolo[1,2-d][1,4,5]oxadiazepine-7,9(8H)-dione, 8-(3′-chloro-4′-fluoro-4-methyl[1,1′-biphenyl]-3-yl)tetrahydro- Cas：845891-65-8 Molecular Formula：C20H18ClFN2O3