Photoresist Chemicals 7-Oxa-3-thia-2,4-diazaoctanoic acid, [2-[[3-chloro-5-(trifluoromethyl)-2-pyridinyl]oxy]-4-(2-methoxyethoxy)phen yl]methyl ester, 3,3-dioxide Cas:926301-43-1 Molecular Formula:C20H23ClF3N3O8S