Photoresist Chemicals 7-Oxa-3-thia-2,4-diazanonanoic acid, 4-(3-methoxy-3-oxopropyl)-2,8-dimethyl-, 2,3-dihydro-2,2-dimethyl-7-benzofuranyl ester Cas：92823-56-8 Molecular Formula：C21H32N2O6S