Photoresist Chemicals 6H-Pyrido[3,4-d]azepin-6-one, 9-[[(1,1-dimethylethyl)dimethylsilyl]oxy]-5,7,8,9-tetrahydro-7-[2-(1H-indol -3-yl)ethyl]- Cas:85514-99-4 Molecular Formula:C25H33N3O2Si