Photoresist Chemicals 6-Quinoxalinecarboxamide, 2-[[[(2-chloro-4-fluorophenyl)methyl]sulfonyl]methyl]-1,2,3,4-tetrahydro-3- oxo-N-(2-thienylmethyl)- Cas:847362-91-8 Molecular Formula:C22H19ClFN3O4S2