Photoresist Chemicals 6-Quinazolinecarboxylic acid, 3,4-dihydro-2-[[[[(2-hydroxy-1,1-dimethylethyl)amino]carbonyl]oxy]methyl ]-5,7-dimethyl-3-[2-[(methylamino)sulfonyl]phenyl]-4-oxo-, ethyl ester Cas:581105-36-4 Molecular Formula:C26H32N4O8S