Photoresist Chemicals 6-Oxa-2,9-dithia-5,8,10-triazatridec-4-en-13-oic acid, 10-butyl-4-(1,1-dimethylethyl)-8-methyl-7-oxo-, ethyl ester Cas：92540-63-1 Molecular Formula：C18H35N3O4S2