Photoresist Chemicals 5H-Pyrrolo[3,2-d]pyrimidine-5-butanamide, 4-[[3-chloro-4-[3-(trifluoromethyl)phenoxy]phenyl]amino]-N-[2-(methylsulf onyl)ethyl]- Cas:871028-23-8 Molecular Formula:C26H25ClF3N5O4S