Photoresist Chemicals 5-Pyrimidinecarboxamide, N-[4-[2-chloro-4-(trifluoromethyl)phenoxy]-2,6-dimethylphenyl]hexahydro -1,3-dimethyl-2,4,6-trioxo- Cas：90684-91-6 Molecular Formula：C22H19ClF3N3O5