Photoresist Chemicals 5-Oxa-1-azabicyclo[4.2.0]oct-2-ene-2-carboxylic acid, 7-amino-3-[[[1-(2-hydroxypropyl)-1H-tetrazol-5-yl]thio]methyl]-7-methoxy -8-oxo-, diphenylmethyl ester Cas:96008-83-2 Molecular Formula:C26H28N6O6S