Photoresist Chemicals 5-Oxa-1-azabicyclo[4.2.0]oct-2-ene-2-carboxylic acid, 7-[[[(2-chloroethenyl)thio]phenylacetyl]amino]-7-methoxy-3-[[(1-methyl-1 H-tetrazol-5-yl)thio]methyl]-8-oxo- Cas:91830-53-4 Molecular Formula:C21H21ClN6O6S2