Photoresist Chemicals 5-Isoxazolecarboxylic acid, 3-[3-[[4-[(4-fluorophenyl)methyl]-1-piperidinyl]carbonyl]-4-methoxyphenyl ]-4,5-dihydro-5-methyl-, methyl ester Cas:876136-99-1 Molecular Formula:C26H29FN2O5