Photoresist Chemicals 5-amino-10-[3,4-dihydroxy-5-(hydroxymethyl)oxolan-2-yl]-9-oxo-2,4,10-triazabicyclo[4.4.0]deca-1,3,5,,cas:61140-07-6 Cas:61140-07-6 Molecular Formula:C13H15N5O6