Photoresist Chemicals 4H-1,4-Benzoxazine-4-acetic acid, 6-[3-amino-3,6-dihydro-2,6-dioxo-4-(trifluoromethyl)-1(2H)-pyrimidinyl]- 7-fluoro-2,3-dihydro-3-oxo-, ethyl ester Cas:488133-52-4 Molecular Formula:C17H14F4N4O6