Photoresist Chemicals 4H-1,3,5-Thiadiazin-4-one, 3-[4-[2-chloro-4-(trifluoromethyl)phenoxy]-2-fluorophenyl]-5-(2,6-difluoro benzoyl)tetrahydro- Cas:596848-93-0 Molecular Formula:C23H13ClF6N2O3S