Photoresist Chemicals 4,7-Methano-1H-isoindole-1,3(2H)-dione, 2-[(1,1-dioxido-1,2-benzisothiazol-3-yl)oxy]-3a,4,7,7a-tetrahydro- Cas：88621-59-4 Molecular Formula：C16H12N2O5S