Photoresist Chemicals 4(1H)-Pyrimidinone, 1-(2-deoxy-5-O-(hydroxy((hydroxy(phosphonooxy)phosphinyl)oxy)phosphinyl)-beta-D-erythro-pentofuranosyl)-2-methoxy-5-methyl- Cas:83133-65-7 Molecular Formula:C11H19N2O14P3