Photoresist Chemicals 4-Thia-1-azabicyclo[3.2.0]heptane-2-carboxylicacid, 3,3-dimethyl-7-oxo-6-[(1-oxohexyl)amino]-, monosodium salt, (2S,5R,6R)-(9CI) Cas：575-47-3 Molecular Formula：C14H22 N2 O4 S . Na