Photoresist Chemicals 4-Thia-1-azabicyclo[3.2.0]heptane-2-carboxylic acid, 6-[[(3-chlorophenyl)methoxyacetyl]amino]-3,3-dimethyl-7-oxo-, (2S,5R,6R)- Cas：94712-14-8 Molecular Formula：C17H19ClN2O5S