Photoresist Chemicals 4-Thia-1-azabicyclo[3.2.0]hept-2-ene-2-carboxylic acid, 6-ethyl-3-[[(1-methyl-1H-tetrazol-5-yl)thio]methyl]-7-oxo-, (2-nitrophenyl)methyl ester, cis- Cas:94615-02-8 Molecular Formula:C18H18N6O5S2