Photoresist Chemicals 4-Thia-1-azabicyclo[3.2.0]hept-2-ene-2-carboxylic acid, 3-[[(2-fluorobenzoyl)oxy]methyl]-6-[(1R)-1-hydroxyethyl]-7-oxo-, 2-propenyl ester, (5R,6S)- Cas:862429-18-3 Molecular Formula:C19H18FNO6S