Photoresist Chemicals 4-Pyridinecarboxylic acid, 1,2,3,4-tetrahydro-2-[[(3S)-2-oxo-3-pyrrolidinyl]oxy]-1-(phenylsulfonyl)-, ethyl ester, (2S,4R)- Cas:881831-34-1 Molecular Formula:C18H22N2O6S