Photoresist Chemicals 4-Piperidinecarboxamide, N-[1-[7-[(4-chloro-2-fluorophenyl)amino]-1-ethyl-3-methyl-1H-pyrazolo[4, 3-d]pyrimidin-5-yl]-4-piperidinyl]-N-ethyl- Cas:928766-94-3 Molecular Formula:C27H36ClFN8O