Photoresist Chemicals 4-Pentenoic acid, 5-[4-[[[(1,1-dimethylethyl)dimethylsilyl]oxy]methyl]-5-[[(1,1-dimethylethyl) diphenylsilyl]oxy]octahydro-1-[(methylsulfonyl)oxy]-2-pentalenyl]-, methyl ester Cas:92185-98-3 Molecular Formula:C38H58O7SSi2