Photoresist Chemicals 4-Morpholinecarboxylic acid, 5-[(1S,2S)-2-(acetylamino)-3-(3,5-difluorophenyl)-1-hydroxypropyl]-2-[[1 -(fluoromethyl)cyclopentyl]methoxy]-, 1,1-dimethylethyl ester, (2R,5R)- Cas:883443-10-5 Molecular Formula:C27H39F3N2O6