Photoresist Chemicals 3H-Pyrazol-3-one, 4-[[4-[(4-chlorophenyl)methylene]-5-oxo-1,3-oxathiolan-2-ylidene]amino] -1,2-dihydro-1,5-dimethyl-2-phenyl- Cas：93634-21-0 Molecular Formula：C21H16ClN3O3S