Photoresist Chemicals 3H-[1,4]Diazepino[1,7-a]indole-3-carboxylic acid, 7-bromo-9-chloro-1,2,4,5,11,11a-hexahydro-, 1,1-dimethylethyl ester Cas:599173-22-5 Molecular Formula:C17H22BrClN2O2