Photoresist Chemicals 3,7-Dioxa-4-aza-6-phosphanonanoic acid, 4,5-bis(1,1-dimethylethyl)-6-ethoxy-2-methyl-, 4-(trifluoromethyl)phenyl ester, 6-oxide Cas：852920-89-9 Molecular Formula：C23H37F3NO6P