Photoresist Chemicals 3,4-Phenanthrenedione,4b,5,6,7,8,8a,9,10-octahydro-9,10-dihydroxy-4b,8,8-trimethyl-2-(1-methylethyl)-,(4bS,8aS,9R,10R)- Cas:88663-97-2 Molecular Formula:C20H28 O4