Photoresist Chemicals 3-Pyridinecarboxylic acid, 5-[2-[5-chloro-2-[(2,4,5-trifluorophenyl)methoxy]phenyl]-1-cyclopenten-1- yl]-2-(trifluoromethyl)-, sodium salt Cas:850863-02-4 Molecular Formula:C25H16ClF6NO3.Na