Photoresist Chemicals 3-Oxazolidinecarboxylic acid, 4-(fluoromethyl)-5-[4-(1H-imidazol-1-yl)phenyl]-2,2-dimethyl-, 1,1-dimethylethyl ester, (4S,5R)- Cas：605651-12-5 Molecular Formula：C20H26FN3O3