Photoresist Chemicals 3-Isoxazolecarboxamide, N-[[trans-3-[2-chloro-3-(1-pyrrolidinylmethyl)phenoxy]cyclobutyl]methyl]- 5-ethyl-N-methyl-, 2,2,2-trifluoroacetate (1: ) Cas:917817-26-6 Molecular Formula:C23H30ClN3O3.xC2HF3O2