Photoresist Chemicals 3-Isoxazolecarboxamide, 5-[[[2-[4-[(2,3-dihydro-1H-inden-5-yl)amino]-3,6-dihydro-2,6-dioxo-1(2H )-pyrimidinyl]ethyl]thio]methyl]-N,N-dimethyl- Cas:591770-74-0 Molecular Formula:C22H25N5O4S