Photoresist Chemicals 2H-Benzimidazol-2-one, 6,7-difluoro-1-[1-(2,3,3a,4,5,6-hexahydro-1H-phenalen-1-yl)-4-piperidin yl]-1,3-dihydro- Cas:848860-87-7 Molecular Formula:C25H27F2N3O