Photoresist Chemicals 2-Pyridinecarboxamide, N-methyl-4-[[3-[[4-(trifluoromethoxy)benzoyl]amino]-1,2,4-benzotriazin-7 -yl]oxy]-, trifluoroacetate Cas:877874-12-9 Molecular Formula:C22H15F3N6O4.xC2HF3O2