Photoresist Chemicals 2-Propenoic acid, 3-[(2R,3R)-3-[[(1,1-dimethylethyl)dimethylsilyl]oxy]tetrahydro-2H-pyran- 2-yl]-, phenylmethyl ester, (2E)- Cas：918886-55-2 Molecular Formula：C21H32O4Si