Photoresist Chemicals 2-Pentalenepentanoic acid, 5-[[(1,1-dimethylethyl)dimethylsilyl]oxy]-4-[[[(1,1-dimethylethyl)dimethylsil yl]oxy]methyl]octahydro-1-[(methylsulfonyl)oxy]-, methyl ester Cas:91078-22-7 Molecular Formula:C28H56O7SSi2