Photoresist Chemicals 2-Oxa-4,6,8-triazadecan-10-oic acid, 5-[2-(1,1-dimethylethoxy)-2-oxoethyl]-1-(9H-fluoren-9-yl)-3,7-dioxo-, methyl ester, (5S)- Cas：611198-49-3 Molecular Formula：C26H31N3O7