Photoresist Chemicals 2-Oxa-3-azabicyclo[2.2.2]oct-5-ene, 5-[[(1,1-dimethylethyl)dimethylsilyl]oxy]-3-(6-methyl-2-pyridinyl)-, (1S,4R)- Cas：688035-93-0 Molecular Formula：C18H28N2O2Si