Photoresist Chemicals 2-Furancarboxylic acid, 5-[[4-[[3-chloro-4-[(3-fluorophenyl)methoxy]phenyl]amino]-5H-pyrrolo[3,2 -d]pyrimidin-5-yl]methyl]-, ethyl ester Cas:871024-19-0 Molecular Formula:C27H22ClFN4O4